Focused ion beam induced deposition: fabrication of three-dimensional microstructures and Young's modulus of the deposited material
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Focused ion beam deposition of new materials: dielectric films for device modification and mask repair, and tantalum films for x-ray mask repair
2. Focused ion-beam system for automated MEMS prototyping and processing
3. A microaccelerometer structure fabricated in silicon-on-insulator using a focused ion beam process
4. Microprocessing at the fingertips
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