A microaccelerometer structure fabricated in silicon-on-insulator using a focused ion beam process-Reference-Cited by-同舟云学术

A microaccelerometer structure fabricated in silicon-on-insulator using a focused ion beam process

Published:1999-03 Issue:3 Volume:73 Page:201-209
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Daniel J.H.,Moore D.F.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference27 articles.

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