Author:
Athas Gregory J.,Noll Kathryn E.,Mello Russell,Hill Raymond,Yansen Don E.,Wenners Frank F.,Nadeau James P.,Ngo Tuan,Siebers Michael
Cited by
13 articles.
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1. Design and fabrication of a flexural harmonic AFM probe with an exchangeable tip;Journal of Micro-Bio Robotics;2017-10
2. Direct-Write Ion Beam Lithography;Journal of Nanotechnology;2014
3. Focused Ion Beam (FIB) Technology for Micro- and Nanoscale Fabrications;Lecture Notes in Nanoscale Science and Technology;2013
4. High temperature focused ion beam response of graphite resulting in spontaneous nanosheet formation;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-11
5. Modeling of precursor coverage in ion-beam induced etching and verification with experiments using XeF2 on SiO2;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2010-09