Influence of Channel Length and High-K Oxide Thickness on Subthreshold DC Performance of Graded Channel and Gate Stack DG-MOSFETs

Abstract

Comparative assessment of graded channel gate stack (GCGS) DG MOSFET structure is done by using two-dimensional (2D) Sentrausu TCAD simulator for different high K oxide thickness. This novel device includes gate stack (GS) engineering (high K) and nonuniformly channel engineering (GC) to suppress the short channel effects and improve the device performance. This novel device can be a better alternative for the future high speed switching and low power circuit applications. It has the advantage of improved breakdown voltage, reduced leakage current, low output conductance and reduced bipolar parasitic effects. The given device must be properly investigated with respect to the variation of different high K oxide thickness on different parameters such as drain induced barrier lowering (DIBL), subthreshold slope (SS), [Formula: see text]/[Formula: see text], [Formula: see text] roll off before fabrication to have better reliability. The 2D Sentrausu TCAD simulator using drift-diffusion model was used to simulate the developed structure and good agreement is obtained with respect to already published result in the sub-threshold regime. The result indicates that there is a need to be optimize the DC parameters for specific circuit applications.