Affiliation:
1. IMEC Interuniversity Microelectronics Center
2. National Academy of Sciences of Ukraine
Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics
Reference14 articles.
1. V.V. Emtsev, Yu.N. Daluda, V.I. Shakhovtsov, V.L. Shyndich, V.B. Neimash, R. S. Antonenko and K. Schmaltz: Sov. Phys. Semicond. Vol. 24 (1990), p.232.
2. P. Hazdra, V. Haslar and M. Bartos: Nucl. Instrum. Methods in Phys. Res. B Vol. 55 (1991), p.637.
3. N. Keskitalo, A. Hallén, L. Josyula and B.G. Svensson: Nucl. Instrum. Meth. in Phys. Res. B Vol. 127/128 (1997), p.410.
4. D.C. Schmidt, B.G. Svensson, J.L. Lindström, S. Godey, E. Ntsoenzok, J.F. Barbot and C. Blanchard: J. Appl. Phys. Vol. 85 (1999), p.3556.
5. J.L. Lindström, L.I. Murin, T. Hallberg, V.P. Markevich, B.G. Svensson, M. Kleverman and J. Hermansson: Nucl. Instrum. Meth. in Phys. Res. B Vol. 186 (2002), p.121.
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