1. Lithography Chapter, International Technology Roadmap for Semiconductors (ITRS), 2013, http://www.itrs.net/Links/2013ITRS/2013Chapters/2013Litho.pdf.
2. Approaching New Metrics for Wafer Flatness: An Investigation of the Lithography Consequences of Wafer Non-Flatness;Valley,2004
3. Wafer Geometry and Lithography Focus Performance for Advanced Nodes – Preliminary Results;Brinkhof,2011
4. International Technology Roadmap for Semiconductors, 2011 Edition, Table LITH2. http://www.itrs.net/Links/2012ITRS/2012Tables/Litho_2012Tables.xlsx
5. Mechanics Modeling of Nanotopography Effects on CMP;Vukkadala,2010