Patterned wafer geometry (PWG) metrology for improving process-induced overlay and focus problems-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Patterned wafer geometry (PWG) metrology for improving process-induced overlay and focus problems

Published:2016-03-15 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
Short-container-title:

Author:

Brunner Timothy A.,Zhou Yue,Wong Cheuk W.,Morgenfeld Bradley,Leino Gerald,Mahajan Sunit

Publisher

SPIE

Reference19 articles.

1. Toward 3nm overlay and critical dimension uniformity: an integrated error budget for double patterning lithography;Arnold,2008

2. Holistic optimization architecture enabling sub-14-nm projection lithography

3. Focus and dose characterization of immersion photoclusters;Brunner,2009

4. Overlay characterization and matching of immersion photoclusters;Minghetti,2010

5. Optical lithography with and without NGL for single-digit nanometer nodes;Lin,2015

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 3D Shape Measurements of Patterned Silicon Wafers;2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2024-05-13

2. Investigation of device overlay variation and control metrology in 3D-NAND process;Metrology, Inspection, and Process Control XXXVII;2023-04-27

3. New wave front phase sensor used for 3D shape measurements of patterned silicon wafers;International Conference on Extreme Ultraviolet Lithography 2022;2022-12-01

4. A novel hybrid resampling for semiconductor wafer defect bin classification;Quality and Reliability Engineering International;2022-10-17

5. Detection and mitigation of furnace anneal induced distortions at the wafer edge;35th European Mask and Lithography Conference (EMLC 2019);2019-08-29

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3