SiGe/Si superlattices on implanted buried‐oxide structures
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.342965
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1. Ge+ ion implantation – a competing technology?;Selected Topics in Group IV and II–VI Semiconductors;1996
2. Ge+ ion implantation — a competing technology?;Journal of Crystal Growth;1995-12
3. Ion Beam Processing for Silicon-on-Insulator;Physical and Technical Problems of SOI Structures and Devices;1995
4. A study of oxygen-implanted Si0.5Ge0.5 alloy by XPS and thermodynamic analysis;Surface and Interface Analysis;1993-02
5. Characterisation of Si/Ge0.5Si0.5 Strained-Layer Superlattices on SIMOX Substrates;Physica Status Solidi (a);1992-08-16
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