Ion Beam Processing for Silicon-on-Insulator
Publisher
Springer Netherlands
Reference42 articles.
1. Roulet, M.E., Schwob, P., and Golecki, I. (1979) , Electron. Lett. 15, 527. 2. Yoshii, T., Taguchi, S., Inoue, T., and Tango, H. (1982), Jpn. J. Appl.Phys.2l, 175. 3. Imai, K., and Unno, H. (1984), IEEE Trans. Electron. Dev. ED-31, 297. 4. Benjamin, J. D., Keen, J.M., Cullis, A.G., Innes, B., and Chew, N.G. (1986),Appl. Phys. Lett. 49, 716. 5. Priolo, F., and Rimini, E. (1990), Materials Science Reports 5, 319.
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