MeV heavy ion induced recrystallization of buried silicon nitride layer: Role of energy loss processes
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2435071
Reference29 articles.
1. Ion Beam Processing for Silicon-on-Insulator
2. Band offsets of wide-band-gap oxides and implications for future electronic devices
3. Reliability of silicon nitride gate dielectrics grown at 400 °C formed by microwave-excited high-density plasma
4. Growth of ultrathin silicon nitride on Si(111) at low temperatures
5. Electrical properties of multiple-layer structures formed by implantation of nitrogen or oxygen and annealed under high pressure
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