Author:
Roulet M.E.,Schwob P.,Golecki I.,Nicolet M.-A.
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Cited by
43 articles.
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1. Soi Materials;Silicon-on-Insulator Technology: Materials to VLSI;2004
2. Silicon-on-Insulator and Porous Silicon;Silicon;2004
3. Chapter 2 A review of buried oxide structures and SOI technologies;New Insulators, Devices and Radiation Effects;1999
4. SOI Materials;Silicon-on-Insulator Technology: Materials to VLSI;1997
5. Ion Beam Processing for Silicon-on-Insulator;Physical and Technical Problems of SOI Structures and Devices;1995