Large area, uniform silicon‐on‐insulator using a buried layer of oxidized porous silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.97577
Reference7 articles.
1. An experimental and theoretical study of the formation and microstructure of porous silicon
2. Microstructure and formation mechanism of porous silicon
3. FIPOS (Full Isolation by Porous Oxidized Silicon) technology and its application to LSI's
4. Crystalline quality of silicon layer formed by FIPOS technology
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