PtSi contact metallurgy formed by three‐temperature annealing sequences and short annealing time
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.338856
Reference8 articles.
1. Effect of the sintering process on the formation and passivation of PtSi
2. PtSi contact metallurgy using electron-beam evaporated Pt films and different annealing processes
3. PtSi Contact Metallurgy Using Sputtered Pt and Different Annealing Processes
4. PtSi contact metallurgy: Comparison of different annealing sequences, annealing time and ambients, and deposition techniques of Pt
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3. Experimental and theoretical electronic structure determination for PtSi;Physical Review B;2003-07-30
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