PtSi contact metallurgy: Comparison of different annealing sequences, annealing time and ambients, and deposition techniques of Pt
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.336888
Reference23 articles.
1. Refractory silicides of titanium and tantalum for low-resistivity gates and interconnects
2. Shallow and parallel silicide contacts
3. Schottky I/sup 2/L
4. Interactions in metallization systems for integrated circuits
5. Review of binary alloy formation by thin film interactions
Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Nanometer scale p-type Schottky barrier metal–oxide-semiconductor field-effect transistor using platinum silicidation through oxide technique combined with two-step annealing process;Journal of Alloys and Compounds;2013-06
2. Ohmic contacts to silicon carbide determined by changes in the surface;Applied Physics Letters;2005-10-17
3. Electrochemical and surface characterization of platinum silicide electrodes and their use as stable platforms for electrogenerated chemiluminescence assays;Journal of Electroanalytical Chemistry;2003-09
4. Recent advances in Schottky barrier concepts;Materials Science and Engineering: R: Reports;2001-11
5. Effect of deposition and treatment conditions on growth of nanometer PtSi heterostructure;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2000
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3