In situ control of the focused-electron-beam-induced deposition process
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1626261
Reference13 articles.
1. A review of focused ion beam applications in microsystem technology
2. Characterization and Application of Materials Grown by Electron-Beam-Induced Deposition
3. Investigation of fabrication parameters for the electron-beam-induced deposition of contamination tips used in atomic force microscopy
4. Fabrication of Sub-Micron Tungsten Carbide (WCx)/Amorphous Carbon (a-C) Stacked Junction By Beam-Induced Reaction Processes
5. Two-dimensional photonic crystals produced by additive nanolithography with electron beam-induced deposition act as filters in the infrared
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