Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies-Reference-Cited by-同舟云学术

Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies

Published:2022-05 Issue: Volume:458 Page:213851
ISSN:0010-8545
Container-title:Coordination Chemistry Reviews
language:en
Short-container-title:Coordination Chemistry Reviews

Author:

Utke I.,Swiderek P.,Höflich K.,Madajska K.,Jurczyk J.,Martinović P.,Szymańska I.B.

Publisher

Elsevier BV

Subject

Materials Chemistry,Physical and Theoretical Chemistry,Inorganic Chemistry

Reference427 articles.

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4. A.L. Johnson, J.D. Parish, Recent developments in molecular precursors for atomic layer deposition, in: Organomet. Chem. Vol. 42, The Royal Society of Chemistry, 2018: pp. 1–53. https://doi.org/10.1039/9781788010672-00001.

5. R.M.M. Thorman, T.P.P. Ragesh Kumar, D.H.H. Fairbrother, O. Ingólfsson, D. Howard Fairbrother, O. Ingólfsson, The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors, Beilstein J. Nanotechnol. 6 (2015) 1904–1926. https://doi.org/10.3762/bjnano.6.194.

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