A highly oriented Al[111] texture developed on ultrathin metal underlayers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.358555
Reference8 articles.
1. Improved metallization for surface acoustic wave devices
2. Stress-induced void formation in metallization for integrated circuits
3. Sputtered Al–Ti Electrodes for High Frequency and High Power SAW Devices
4. Application of Ion-Beam-Sputtered Al Films to Ultrathin Surface Acoustic Wave Devices
5. Highly Preferred [111] Texture in Al Films Deposited on Ultrathin Metal Underlayers
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