Sputtered Al–Ti Electrodes for High Frequency and High Power SAW Devices
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Microstructure of Al/Ti metallization layers;INT J MATER RES;2022
2. A study of the stress and resistivity of Al/Ti films deposited by an ion beam assisted process for surface acoustic wave devices applications;Materials Science and Engineering: A;2006-02
3. Ion bombardment-induced high orientation of Al/Ti films for surface acoustic wave device applications;Journal of Electronic Materials;2005-07
4. Effects of Si3N4 and DLC passivation layers on characteristics of SAW filters;Diamond and Related Materials;2005-02
5. Microstructure and composition of annealed Al/Ti-metallization layers;Analytical and Bioanalytical Chemistry;2004-04-22
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