Microstructure and composition of annealed Al/Ti-metallization layers
Author:
Publisher
Springer Science and Business Media LLC
Subject
Biochemistry,Analytical Chemistry
Link
http://link.springer.com/content/pdf/10.1007/s00216-004-2619-9.pdf
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1. Durability of TiAl based surface acoustic wave devices for sensing at intermediate high temperatures;Journal of Materials Research and Technology;2023-03
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4. Phase Formation and High-Temperature Stability of Very Thin Co-Sputtered Ti-Al and Multilayered Ti/Al Films on Thermally Oxidized Si Substrates;Materials;2020-04-27
5. Coevaporation and structuring of titanium–aluminum alloy thin films;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2017-11
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