1. Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
2. College of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China
3. College of Electronic Information and Optical Engineering, Nankai University, Tianjin 300350, China
4. School of Materials Science and Engineering, Nankai University, Tianjin 300350, China
5. School of Materials Science and Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, China
6. Yangtze Memory Technologies Company Ltd., Wuhan, China