Electrical breakdown strength enhancement in aluminum scandium nitride through a compositionally modulated periodic multilayer structure-Reference-Cited by-同舟云学术

Electrical breakdown strength enhancement in aluminum scandium nitride through a compositionally modulated periodic multilayer structure

Published:2021-10-14 Issue:14 Volume:130 Page:144101
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Zheng Jeffrey X.¹^ORCID,Wang Dixiong²^ORCID,Musavigharavi Pariasadat¹²,Fiagbenu Merrilyn Mercy Adzo²,Jariwala Deep²^ORCID,Stach Eric A.¹³^ORCID,Olsson Roy H.²^ORCID

Affiliation:

1. Department of Materials Science and Engineering, University of Pennsylvania, 3231 Walnut St., Philadelphia, Pennsylvania 19104, USA

2. Department of Electrical and Systems Engineering, University of Pennsylvania, 3205 Walnut St., Philadelphia, Pennsylvania 19104, USA

3. Laboratory for Research on the Structure of Matter, University of Pennsylvania, Philadelphia, Pennsylvania 19104, USA

Funder

Semiconductor Research Corporation

Defense Advanced Research Projects Agency

National Science Foundation

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://aip.scitation.org/doi/am-pdf/10.1063/5.0064041

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