Interfacial Origins of Electrical Breakdown Strength Enhancement in AlScN through Multilayer Structure-Reference-Cited by-同舟云学术

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Interfacial Origins of Electrical Breakdown Strength Enhancement in AlScN through Multilayer Structure

Published:2024-07 Issue:Supplement_1 Volume:30 Page:
ISSN:1431-9276
Container-title:Microscopy and Microanalysis
language:en
Short-container-title:

Author:

Gharavi Paria¹,Olsson Roy H²,Stach Eric³⁴

Affiliation:

1. Department of Materials Science and Engineering, University of Central Florida , Orlando, Florida , United States

2. Department of Electrical and Systems Engineering, University of Pennsylvania , Philadelphia, PA , United States

3. Department of Materials Science and Engineering, University of Pennsylvania , Philadelphia, PA , United States

4. Laboratory for Research on the Structure of Matter, University of Pennsylvania , Philadelphia, PA , United States

Publisher

Oxford University Press (OUP)

Link

https://academic.oup.com/mam/article-pdf/30/Supplement_1/ozae044.531/58671062/ozae044.531.pdf

Reference4 articles.

1. Electrical breakdown strength enhancement in aluminum scandium nitride through a compositionally modulated periodic multilayer structure

2. Four-Dimensional Scanning Transmission Electron Microscopy (4D-STEM): From Scanning Nanodiffraction to Ptychography and Beyond

3. Nanoscale Structural and Chemical Properties of Ferroelectric Aluminum Scandium Nitride Thin Films

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