Nanoscale Structural and Chemical Properties of Ferroelectric Aluminum Scandium Nitride Thin Films-Reference-Cited by-同舟云学术

Nanoscale Structural and Chemical Properties of Ferroelectric Aluminum Scandium Nitride Thin Films

Author:

Musavigharavi Pariasadat¹²^ORCID,Meng Andrew C.²^ORCID,Wang Dixiong¹,Zheng Jeffery²,Foucher Alexandre C.²^ORCID,Olsson Roy H.¹,Stach Eric A.²³^ORCID

Affiliation:

1. Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States

2. Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States

3. Laboratory for Research on the Structure of Matter, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States

Funder

Defense Advanced Research Projects Agency

Basic Energy Sciences

Semiconductor Research Corporation

National Science Foundation

Publisher

American Chemical Society (ACS)

Subject

Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials

Link

Reference32 articles.

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