Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference13 articles.
1. Measurements of the bulk, C-axis electromechanical coupling constant as a function of AlN film quality
2. DCS Tx filters using AlN resonators with iridium electrodes
3. Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
4. Preparation of scandium aluminum nitride thin films by using scandium aluminum alloy sputtering target and design of experiments
5. Origin of the Anomalous Piezoelectric Response in WurtziteScxAl1−xNAlloys
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