Observation of collisionless heating of low energy electrons in low pressure inductively coupled argon plasmas
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3042264
Reference21 articles.
1. Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz
2. Pressure Heating of Electrons in Capacitively Coupled rf Discharges
3. Stochastic electron heating in bounded radio‐frequency plasmas
4. Negative Power Absorption in Inductively Coupled Plasma
5. Electron Cyclotron Resonance in a Weakly Magnetized Radio-Frequency Inductive Discharge
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