The influence of gas pressure on E↔H mode transition in argon inductively coupled plasmas-Reference-Cited by-同舟云学术

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The influence of gas pressure on E↔H mode transition in argon inductively coupled plasmas

Published:2018-03 Issue:3 Volume:8 Page:035121
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Zhang Xiao¹,Zhang Zhong-kai¹^ORCID,Cao Jin-xiang¹,Liu Yu²,Yu Peng-cheng¹

Affiliation:

1. CAS Key Laboratory of Geospace Environment, Modern Physics Department, University of Science and Technology of China, Hefei, Anhui 230026, China

2. CAS Key Laboratory of Geospace Environment, School of Earth and Space Science, University of Science and Technology of China, Hefei 230026, China

Funder

Fundamental Resarch Funds For the Central Universities

National Natural Science Foundation of China

China Postdoctoral Science Foundation

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5012560

Reference29 articles.

1. Principles of Plasma Discharges and Materials Processing

2. On the multistep ionizations in an argon inductively coupled plasma

3. Observation of collisionless heating of low energy electrons in low pressure inductively coupled argon plasmas

4. The transition mechanisms of the E to H mode and the H to E mode in an inductively coupled argon-mercury mixture discharge

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. E–H transitions in Ar/O2 and Ar/Cl2 inductively coupled plasmas: Antenna geometry and operating conditions;Journal of Applied Physics;2023-05-01

2. Optical Emission Spectroscopic Measurement of Argon Low-Pressure Inductively Coupled Plasma Based on the Optimization Algorithm of Plasma Diagnostic Model;IEEE Transactions on Plasma Science;2022-06

3. Power transfer efficiency and the power threshold for E–H mode transition in inductively coupled plasmas;Journal of Applied Physics;2022-04-07

4. Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma;Current Applied Physics;2022-04

5. Magnetic and Pressure Effects on E–H Mode Transition Power and Electron Energy Distribution in Helical Antenna-Coupled RF Plasma;IEEE Transactions on Plasma Science;2021-09

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