Optical Emission Spectroscopic Measurement of Argon Low-Pressure Inductively Coupled Plasma Based on the Optimization Algorithm of Plasma Diagnostic Model-Reference-Cited by-同舟云学术

Optical Emission Spectroscopic Measurement of Argon Low-Pressure Inductively Coupled Plasma Based on the Optimization Algorithm of Plasma Diagnostic Model

Published:2022-06 Issue:6 Volume:50 Page:1875-1889
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:
Short-container-title:IEEE Trans. Plasma Sci.

Author:

Yamashita Yuya¹^ORCID,Akiba Takuya¹,Iwanaga Toshihide²,Date Shuichi²,Yamaoka Hidehiko²,Akatsuka Hiroshi³^ORCID

Affiliation:

1. Optical Radiation and Acoustics Technology Group, Tokyo Metropolitan Industrial Technology Research Institute, Tokyo, Japan

2. Electrical Technology Group, Tokyo Metropolitan Industrial Technology Research Institute, Tokyo, Japan

3. Institute of Innovative Research, Tokyo Institute of Technology, Tokyo, Japan

Funder

JSPS KAKENHI

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

http://xplorestaging.ieee.org/ielx7/27/9804197/09775641.pdf?arnumber=9775641

Reference37 articles.

1. A detailed consideration of resonance radiation trapping in the argon inductively coupled plasma

2. Effect of Simultaneous Doppler and Collision Broadening and of Hyperfine Structure on the Imprisonment of Resonance Radiation

3. A new look at the statistical model identification

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1. Quantitative analysis of optical emission spectroscopy for plasma process monitoring;Japanese Journal of Applied Physics;2024-05-01

2. Spatial distribution diagnosis of electron temperature and density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement and collisional-radiative model;Journal of Vacuum Science & Technology A;2024-01-29

3. Radial dependence diagnosis of inductively coupled Ar plasma based upon optical emission spectroscopic measurement with spectral reflectance compensation;Review of Scientific Instruments;2023-08-01