Spatial distribution diagnosis of electron temperature and density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement and collisional-radiative model-Reference-Cited by-同舟云学术

Spatial distribution diagnosis of electron temperature and density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement and collisional-radiative model

Published:2024-01-29 Issue:2 Volume:42 Page:
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:

Author:

Yamashita Yuya¹²^ORCID,Doi Kenta³^ORCID,Kiyota Tetsuji⁴^ORCID,Ishi Kenta¹^ORCID,Watanabe Shuhei¹^ORCID,Kikuchi Wataru¹^ORCID,Nezu Atsushi⁵⁶^ORCID,Akatsuka Hiroshi¹⁶^ORCID

Affiliation:

1. Department of Electrical and Electronic Engineering, School of Engineering, Tokyo Institute of Technology 1 , 2-12-1-N1-10 Ookayama, Meguro-ku, Tokyo 152-8550, Japan

2. Research Fellow DC, Japan Society for the Promotion of Science 2 , Kojimachi Business Center Building, 5-3-1 Kojimachi, Chiyoda-ku, Tokyo 102-0083, Japan

3. Institute of Advanced Technology, ULVAC, Inc. 3 , 1220-1 Suyama, Susono-shi, Shizuoka 410-1231, Japan

4. Strategic Planning Department, ULVAC, Inc. 4 , 2500 Hagisono, Chigasaki-shi, Kanagawa 253-8543, Japan

5. Safety and Radiation Management Division, Open Facility Center, Tokyo Institute of Technology 5 , 2-12-1-N1-10 Ookayama, Meguro-ku, Tokyo 152-8550, Japan

6. Laboratory for Zero-Carbon Energy, Institute of Innovative Research, Tokyo Institute of Technology 6 , 2-12-1-N1-10 Ookayama, Meguro-ku, Tokyo 152-8550, Japan

Abstract

There are few reported cases in which the spatial distribution of spectral emission coefficients of plasmas from tomographic optical emission spectroscopy measurements is analyzed based on a collisional-radiative model to diagnose the spatial distribution electron temperature of Te and density Ne. This study aimed at in situ diagnosis of process plasma. The spectral radiance of 18 lines-of-sight was measured simultaneously in argon inductively coupled plasma. The spatial distribution of the excited level number density distribution was calculated from the spatial distribution of spectral emission coefficients obtained from spectral tomography calculations. The three-dimensional distribution of Te and Ne was analyzed using a collisional-radiative model from the obtained spatial distribution of the excited levels number density. The effects of power and pressure on the dependence of the spatial distribution of Te and Ne were discussed. Furthermore, data processing methods for spectral tomographic measurements with coarse wavelength resolution were also discussed.

Funder

JST SPRING

JSPS KAKENHI

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

https://pubs.aip.org/avs/jva/article-pdf/doi/10.1116/6.0003209/19209077/023003_1_6.0003209.pdf

Reference25 articles.

1. X‐ray tomography on plasmas with arbitrary cross sections and limited access

2. X-ray tomography on JET

3. Tomographic optical emission spectroscopy of a high enthalpy air plasma flow

4. A spectroscopical study of H$$_{2}$$ emission in a simply magnetized toroidal plasma

5. Optical computerized tomography of the E-H transition in inductively coupled plasmas in Ar and Ar-CF4mixtures