Pressure Heating of Electrons in Capacitively Coupled rf Discharges
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.75.1312/fulltext
Reference15 articles.
1. Plasma processing
2. Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz
3. Electron acoustic waves in capacitively coupled, low-pressure rf glow discharges
4. Analytical solution for capacitive RF sheath
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