Atomistic simulation of damage accumulation and amorphization in Ge-Reference-Cited by-同舟云学术

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Atomistic simulation of damage accumulation and amorphization in Ge

Published:2015-02-07 Issue:5 Volume:117 Page:055703
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Gomez-Selles Jose L.¹^ORCID,Claverie Alain²,Sklenard Benoit³,Benistant Francis⁴,Martin-Bragado Ignacio¹

Affiliation:

1. IMDEA Materials Institute, Eric Kandel 2, 28906 Getafe, Madrid, Spain

2. CEMES/CNRS, 29 rue J. Marvig, 31055 Toulouse Cedex, France

3. CEA, LETI, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France

4. GLOBALFOUNDRIES Singapore Pte Ltd., 60 Woodlands Industrial Park D Street 2, Singapore 738406, Singapore

Funder

GLOBALFOUNDRIES

Ministerio de Economía y Competitividad (Ministry of Economy and Competitiveness)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4907211

Reference39 articles.

1. Academic and industry research progress in germanium nanodevices

2. Germanium Based Field-Effect Transistors: Challenges and Opportunities

3. Considerations for Ultimate CMOS Scaling

4. Diffusion, activation, and recrystallization of boron implanted in preamorphized and crystalline germanium

5. Competition between damage buildup and dynamic annealing in ion implantation into Ge

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Disorder and cavity evolution in single-crystalline Ge during implantation of Sb ions monitored in-situ by spectroscopic ellipsometry;Materials Science in Semiconductor Processing;2022-12

2. Dynamic annealing in Ge studied by pulsed ion beams;Scientific Reports;2017-10-13

3. The role of grain size in He bubble formation: Implications for swelling resistance;Journal of Nuclear Materials;2017-02

4. Retraction: “Atomistic simulation of damage accumulation and amorphization in Ge” [J. Appl. Phys. 117, 055703 (2015)];Journal of Applied Physics;2017-01-28

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