Measuring the ion current in electrical discharges using radio-frequency current and voltage measurements
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.121032
Reference13 articles.
1. Measurement of ion impact energy and ion flux at the rf electrode of a parallel plate reactive ion etcher
2. Effect of electrode material on measured ion energy distributions in radio‐frequency discharges
3. Ion flux and ion power losses at the electrode sheaths in a symmetrical rf discharge
4. Experimental test of models of radio-frequency plasma sheaths
5. Plasma parameter estimation from rf impedance measurements in a dry etching system
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