Ion flux and ion power losses at the electrode sheaths in a symmetrical rf discharge
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.348530
Reference14 articles.
1. Electrical Properties of RF Sputtering Systems
2. Dynamic model of the electrode sheaths in symmetrically driven rf discharges
3. An experimental system for symmetric capacitive rf discharge studies
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