On the nature of thermally activated defects in n-type FZ silicon grown in nitrogen atmosphere

Abstract

n-type float-zone silicon grown in a nitrogen atmosphere contains defects which are activated by temperatures between 450 and 700 °C. We use deep level transient spectroscopy (DLTS) to study the nature of these defects and the impact of the nitrogen content and the polysilicon feed stock type. We find four dominant DLTS peaks with activation energies of Ena = 0.16 eV (E1), Ena = 0.21 eV (E2), Ena = 0.34 eV (E4), and Ena = 0.64 eV (E6). We tentatively assign the two DLTS peaks E1 and E2 to single acceptor and single donor levels of the same defect, a complex of nitrogen with an impurity. Furthermore, we tentatively assign the two DLTS peaks labeled E4 and E6 to two levels of the off-center substitutional nitrogen. Based on the apparent electron capture cross sections and an analysis of the electric field effect on the emission rates, we propose them to be double and single acceptor levels, respectively. Due to its position at midgap and the competing electron and hole emission, the apparent concentration of E6 is reduced to one fifth of the total defect concentration. Correcting for these processes, we find the activation energies for electron and hole emission to be En = 0.50 eV and Ep = 0.68 eV.