The impact of frequency mixing on sheath properties: Ion energy distribution and Vdc∕Vrf interaction
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1905798
Reference12 articles.
1. Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma
2. Analytic model for a dual frequency capacitive discharge
3. Modelling of the dual frequency capacitive sheath in the intermediate pressure range
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