Modelling of the dual frequency capacitive sheath in the intermediate pressure range
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/37/i=10/a=006/pdf
Reference24 articles.
1. Standing wave and skin effects in large-area, high-frequency capacitive discharges
2. Control of ion energy and flux in a dual radio frequency excitation magnetron sputtering discharge
3. Two-dimensional CT images of two-frequency capacitively coupled plasma
4. Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma
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