Enhanced light coupling into periodic arrays of nanoscale semiconducting fins

Author:

Gawlik Andrzej123,Bogdanowicz Janusz1,Schulze Andreas1,Nuytten Thomas1,Tarnowski Karol4,Misiewicz Jan3,Vandervorst Wilfried12

Affiliation:

1. IMEC, Kapeldreef 75, 3001 Leuven, Belgium

2. Instituut voor Kern-en Stralingsfysica, KU Leuven, Celestijnenlaan 200D, 3001 Leuven, Belgium

3. Department of Experimental Physics, Faculty of Fundamental Problems of Technology, Wrocław University of Science and Technology, Wybrzeże Wyspiańskiego 27, 50-370 Wrocław, Poland

4. Department of Optics and Photonics, Faculty of Fundamental Problems of Technology, Wrocław University of Science and Technology, Wybrzeże Wyspiańskiego 27, 50-370 Wrocław, Poland

Funder

Fonds Wetenschappelijk Onderzoek

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Reference24 articles.

1. Fabrication of Bulk-Si FinFET using CMOS compatible process

2. X. Huang , W.C. Lee , C. Kuo , D. Hisamoto , L. Chang , J. Kedzierski , E. Anderson , H. Takeuchi , Y.K. Choi , K. Asano , V. Subramanian , T.J. King , J. Bokor , and C. Hu , inInternational Electron Devices Meeting 1999 Technical Digest Cat No. 99CH36318(1999), pp. 67–70.

3. Simulation of pattern effect induced by millisecond annealing used in advanced metal-oxide-semiconductor technologies

4. Optical–thermal simulation applied to the study of the pattern effects induced by the sub-melt laser anneal process in advanced CMOS technologies

5. Advanced Raman Spectroscopy Using Nanofocusing of Light

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