Critical dimension metrology using Raman spectroscopy-Reference-Cited by-同舟云学术

Critical dimension metrology using Raman spectroscopy

Published:2020-07-27 Issue:4 Volume:117 Page:043102
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Gawlik Andrzej¹²³^ORCID,Bogdanowicz Janusz¹,Nuytten Thomas¹,Charley Anne-Laure¹,Teugels Lieve¹,Misiewicz Jan³,Vandervorst Wilfried¹²

Affiliation:

1. IMEC, Kapeldreef 75, 3001 Leuven, Belgium

2. Quantum Solid-State Physics, KU Leuven, Celestijnenlaan 200D, 3001 Leuven, Belgium

3. Department of Experimental Physics, Faculty of Fundamental Problems of Technology, Wrocław University of Science and Technology, Wybrzeże Wyspiańskiego 27, 50-370 Wrocław, Poland

Funder

Fonds Wetenschappelijk Onderzoek

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/5.0013506

Reference41 articles.

1. Thin high numerical aperture metalens

2. Novel and efficient Mie-metamaterial thermal emitter for thermophotovoltaic systems

3. A Review of Tunable Wavelength Selectivity of Metamaterials in Near-Field and Far-Field Radiative Thermal Transport

4. Design and fabrication of birefringent nano-grating structure for circularly polarized light emission

5. All-metal flexible large-area multiband waveplate

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