Author:
Cacho F.,Bono H.,Beneyton R.,Dumont B.,Colin A.,Morin P.
Subject
General Physics and Astronomy
Reference31 articles.
1. Proceedings of the 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors;Bidaud M.,2007
2. The Effect of Multilayer Patterns on Temperature Uniformity during Rapid Thermal Processing
3. Radiative Properties
of Patterned Wafers With Nanoscale Linewidth
4. Rapid thermal processing of silicon wafers with emissivity patterns
5. Proceedings of the tenth IEEE International Conference on Advanced Thermal Processing of Semiconductors;Niess J.,2002
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献