Advanced Raman Spectroscopy Using Nanofocusing of Light-Reference-Cited by-同舟云学术

Advanced Raman Spectroscopy Using Nanofocusing of Light

Published:2017-01-13 Issue:8 Volume:19 Page:1600612
ISSN:1438-1656
Container-title:Advanced Engineering Materials
language:en
Short-container-title:Adv. Eng. Mater.

Author:

Nuytten Thomas¹,Bogdanowicz Janusz¹,Hantschel Thomas¹,Schulze Andreas¹,Favia Paola¹,Bender Hugo¹,De Wolf Ingrid¹²,Vandervorst Wilfried¹³

Affiliation:

1. imec, Kapeldreef 75; B-3001 Leuven Belgium

2. Dept. of Materials Engineering; KU Leuven B-3001 Leuven Belgium

3. Instituut voor Kern- en Stralingsfysica; KU Leuven B-3001 Leuven Belgium

Publisher

Wiley

Subject

Condensed Matter Physics,General Materials Science

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/adem.201600612/fullpdf

Reference33 articles.

1. Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits

2. Effect of static uniaxial stress on the Raman spectrum of silicon

3. J. Mitard L. Witters H. Arimura Y. Sasaki A. P. Milenin R. Loo A. Hikavyy G. Eneman P. Lagrain H. Mertens S. Sioncke C. Vrancken H. Bender K. Barla N. Horiguchi A. Mocuta N. Collaert A. V.-Y. Thean IEEE International Electron Devices Meeting EEE Inc Piscataway, NJ 2014 16.5.1

4. Evaluation of Anisotropic Biaxial Stress in Thin Strained-SiGe Layer Using Surface Enhanced Raman Spectroscopy

5. Electrical field analysis of metal-surface plasmon resonance using a biaxially strained Si substrate

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Decoupling analysis of stress components on monocrystalline silicon using angle-resolved oblique backscattering Raman spectroscopy;Acta Mechanica Sinica;2024-02-07

2. Taming the Distribution of Light in Gate-All-Around Semiconductor Devices;Nano Letters;2024-01-17

3. Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry;Scientific Reports;2022-10-22

4. Off-axis Raman spectroscopy for nanoscale stress metrology;Journal of Applied Physics;2022-07-21

5. Linearized radially polarized light for improved precision in strain measurements using micro-Raman spectroscopy;Optics Express;2021-10-08