Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits-Reference-Cited by-同舟云学术

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Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits

Published:1996-02-01 Issue:2 Volume:11 Page:139-154
ISSN:0268-1242
Container-title:Semiconductor Science and Technology
language:
Short-container-title:Semicond. Sci. Technol.

Author:

Wolf Ingrid De

Publisher

IOP Publishing

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference87 articles.

1. A scaling consideration on mechanical stress-induced hot-carrier effects

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