Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas-Reference-Cited by-同舟云学术

Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas

Published:2015-04 Issue:4 Volume:22 Page:043508
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Xu Hui-Jing¹,Zhao Shu-Xia¹,Zhang Yu-Ru¹,Gao Fei¹,Li Xue-Chun¹,Wang You-Nian¹

Affiliation:

1. Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China

Funder

National Magnetic Confinement Fusion Science Program, China

National Natural Science Foundation of China (NSFC)

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4917335

Reference40 articles.

1. Review of inductively coupled plasmas for plasma processing

2. Inductive plasmas for plasma processing

3. On a dual inductively coupled plasma for direct and remote plasma in a reactor

4. Effect of capacitive to inductive coupling transition in multiple linear U-type antenna on silicon thin film deposition from pure SiH4 discharges

5. Langmuir probe measurements in an inductively coupled plasma source

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