Effect of capacitive to inductive coupling transition in multiple linear U-type antenna on silicon thin film deposition from pure SiH4 discharges-Reference-Cited by-同舟云学术

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Effect of capacitive to inductive coupling transition in multiple linear U-type antenna on silicon thin film deposition from pure SiH4 discharges

Published:2008-07 Issue:4 Volume:26 Page:842-846
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Kim Hong Bum,Lee Hyoung Cheol,Kim Kyong Nam,Yeom Geun Young

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.2924340

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas;Physics of Plasmas;2015-04

2. Property of Nano-thick Silicon Films Fabricated by Low Temperature Inductively Coupled Plasma Chemical Vapor Deposition Process;Korean Journal of Metals and Materials;2011-04-05

3. From amorphous to microcrystalline silicon: Moving from one to the other by halogenated silicon plasma chemistry;Philosophical Magazine;2009-10

4. Residual stress on nanocrystalline silicon thin films deposited under energetic ion bombardment by using internal ICP-CVD;Thin Solid Films;2009-05

5. Fluid simulation of the E-H mode transition in inductively coupled plasma;Journal of Applied Physics;2009-04-15

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