Hysteresis and current reduction during E–H mode transition in an inductively coupled plasma
Author:
Affiliation:
1. Department of Electrical Engineering, Hanyang University, Seoul 04763, South Korea
2. Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 04763, South Korea
Funder
National Research Foundation of Korea
Ministry of Trade, Industry and Energy
Korea Electric Power Corporation
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5133449
Reference18 articles.
1. Hysteresis and the E-to-H transition in radiofrequency inductive discharges
2. Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment and Modeling
3. Power transfer efficiency and mode jump in an inductive RF discharge
4. Heating-mode transition in the capacitive mode of inductively coupled plasmas
5. Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Experimental investigation on the hysteresis in low-pressure inductively coupled neon discharge;Physics of Plasmas;2022-09
2. Effect of RF bias power on discharge mode transition and its hysteresis in inductively coupled plasmas;Physics of Plasmas;2022-01
3. Power characteristics of multiple inductively coupled RF discharges inside a metallic chamber;Plasma Science and Technology;2021-11-25
4. Numerical investigation of low pressure inductively coupled plasma sources: A review;Acta Physica Sinica;2021
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3