Hysteresis and current reduction during E–H mode transition in an inductively coupled plasma
Author:
Affiliation:
1. Department of Electrical Engineering, Hanyang University, Seoul 04763, South Korea
2. Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 04763, South Korea
Funder
National Research Foundation of Korea
Ministry of Trade, Industry and Energy
Korea Electric Power Corporation
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5133449
Reference18 articles.
1. Hysteresis and the E-to-H transition in radiofrequency inductive discharges
2. Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment and Modeling
3. Power transfer efficiency and mode jump in an inductive RF discharge
4. Heating-mode transition in the capacitive mode of inductively coupled plasmas
5. Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma
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2. Experimental investigation on the hysteresis in low-pressure inductively coupled neon discharge;Physics of Plasmas;2022-09
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5. Numerical investigation of low pressure inductively coupled plasma sources: A review;Acta Physica Sinica;2021
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