Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3361199
Reference27 articles.
1. Ion bombardment energy distributions in a radio frequency induction plasma
2. Novel radio‐frequency induction plasma processing techniques
3. On the heating mode transition in high-frequency inductively coupled argon discharge
4. On the E - H mode transition in RF inductive discharges
5. Characterization of the E to H transition in a pulsed inductively coupled plasma discharge with internal coil geometry: bi-stability and hysteresis
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