Effects of matching network on mode transitions in a helicon wave plasma source-Reference-Cited by-同舟云学术

Effects of matching network on mode transitions in a helicon wave plasma source

Published:2020-07-28 Issue:4 Volume:128 Page:043301
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Hu Yibo¹²^ORCID,Ji Peiyu¹²,Yang Jiaqi¹²,Jin Chenggang¹²,Zhuge Lanjian³,Wu Xuemei¹²^ORCID

Affiliation:

1. School of Physical Science and Technology and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215006, China

2. Jiangsu Key Laboratory of Thin Films, Soochow University, Suzhou 215006, China

3. Analysis and Testing Center, Soochow University, Suzhou 215123, China

Funder

National Magnetic Confinement Fusion Program of China

National Natural Science Foundation of China

Priority Academic Program Development of Jiangsu Higher Education Institutions

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5131164

Reference62 articles.

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4. Different modes of capacitively coupled radio-frequency discharge in methane

5. CI.The electrodeless discharge through gases

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