Review of inductively coupled plasmas: Nano-applications and bistable hysteresis physics
Author:
Affiliation:
1. Korea Research Institute of Standards and Science, Daejeon 305-340, South Korea
Funder
R&D Convergence Program of NST
Korea Research Institute of Standards and Science
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5012001
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