Plasma etching resistance and mechanical properties of polymorph Gd2O3-MgO nanocomposite with Zr phase stabilizer incorporation

Author:

Ham Su Been,Shin Yu-BinORCID,Kim Seonghyeon,Kim Ha-Neul,Kim Mi-Ju,Ko Jae-WoongORCID,Lee Jae-WookORCID,Park Young-Jo,Kim Jung-Hyung,Lee Hyo-ChangORCID,Yoon Seog-YoungORCID,Ma Ho Jin

Funder

Korea Institute of Materials Science

National Research Foundation of Korea

Ministry of Science, ICT and Future Planning

Publisher

Elsevier BV

Reference57 articles.

1. Plasma dicing before grinding process for highly reliable singulation of low-profile and large die sizes in advanced packages;Kim;Micro Nano Syst. Lett.,2023

2. Investigation of SiO2 Etch Characteristics by C6F6/Ar/O2 Plasmas Generated Using Inductively Coupled Plasma and Capacitively Coupled Plasma;Sung;Materials (Basel).,2022

3. On the Control of Plasma Parameters and Active Species Kinetics in CF4 + O2 + Ar Gas Mixture by CF4/O2 and O2/Ar Mixing Ratios;Efremov;Plasma Chem. Plasma Process.,2017

4. Plasma resistant glass (PRG) for reducing particulate contamination during plasma etching in semiconductor manufacturing: A review;Choi;Mater. Today Commun.,2023

5. Processing map to control the erosion of Y2O3 in fluorine based etching plasmas;Kindelmann;J. Am. Ceram. Soc.,2022

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3