Composition-dependent structural and electrical properties of p-type SnOx thin films prepared by reactive DC magnetron sputtering: effects of oxygen pressure and heat treatment-Reference-Cited by-同舟云学术

Composition-dependent structural and electrical properties of p-type SnOx thin films prepared by reactive DC magnetron sputtering: effects of oxygen pressure and heat treatment

Published:2016 Issue:75 Volume:6 Page:71757-71766
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Han Sang Jin¹²³⁴⁵,Kim Sungmin¹²³⁴⁵,Ahn Joongyu⁶⁷⁸⁵,Jeong Jae Kyeong⁹¹⁰¹¹⁵,Yang Hoichang⁶⁷⁸⁵,Kim Hyeong Joon¹²³⁴⁵

Affiliation:

1. Department of Materials Science and Engineering

2. Inter-University Semiconductor Research Center

3. Seoul National University

4. Seoul 151-742

5. Republic of Korea

6. Department of Applied Organic Materials Engineering

7. Inha University

8. Incheon 402-751

9. Department of Electronic Engineering

10. Hanyang University

11. Seoul 133-791

Abstract

The composition-dependent structural and electrical properties of p-type SnOx films prepared by reactive DC sputtering at various oxygen partial pressures (P_O) and post-heat treatment temperatures (T_A) were investigated.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2016/RA/C6RA08726D

Reference38 articles.

1. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors

2. D. Ginley and P.John, Transparent Conductors, in Handbook of Transparent Conductors, ed. D. Ginley, H. Hosono and D. C. Paine, Springer Science & Business Media, 2010, pp. 1–25

3. Oxide Semiconductor Thin-Film Transistors: A Review of Recent Advances

4. Structural, Chemical, Optical, and Electrical Evolution of SnOx Films Deposited by Reactive rf Magnetron Sputtering

5. p-channel thin-film transistor using p-type oxide semiconductor, SnO

Cited by 23 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Experimental Investigation of Si/SnOx Heterojunction for Its Tunable Optoelectronic Properties;IEEE Photonics Journal;2024-10

2. Facile routes to enhance doping efficiency using nanocomposite structures for high-mobility and stable PEALD-ITGO TFTs;Applied Surface Science;2024-08

3. Extrinsic oxygen defects in SnO/SnO2 heterostructure for efficient NO2 gas detection;Sensors and Actuators B: Chemical;2024-01

4. Electrical Evolution of p-Type SnO_x Film and Transistor Deposited by RF Magnetron Sputtering;IEEE Transactions on Electron Devices;2023-06

5. The Significance of an In Situ ALD Al₂O₃ Stacked Structure for p‐Type SnO TFT Performance and Monolithic All‐ALD‐Channel CMOS Inverter Applications;Advanced Electronic Materials;2023-03-10