Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/nature03090.pdf
Reference26 articles.
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3. Yang, C.-S., Smith, L. L., Arthur, C. B. & Parsons, G. N. Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates. J. Vac. Sci. Technol. B 18, 683–689 (2000)
4. Carey, P. G., Smith, P. M., Theiss, S. D. & Wickboldt, P. Polysilicon thin film transistors fabricated on low temperature plastic substrates. J. Vac. Sci. Technol. A 17, 1946–1949 (2000)
5. Wang, S. C. et al. Device transfer technology by backside etching for poly-Si thin-film transistors on glass/plastic substrate. Jpn. J. Appl. Phys. 42, 1044–1046 (2003)
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