Surface mobility and impact of precursor dosing during atomic layer deposition of platinum:in situmonitoring of nucleation and island growth-Reference-Cited by-同舟云学术

Surface mobility and impact of precursor dosing during atomic layer deposition of platinum:in situmonitoring of nucleation and island growth

Published:2020 Issue:43 Volume:22 Page:24917-24933
ISSN:1463-9076
Container-title:Physical Chemistry Chemical Physics
language:en
Short-container-title:Phys. Chem. Chem. Phys.

Author:

Dendooven Jolien¹²³⁴^ORCID,Van Daele Michiel¹²³⁴^ORCID,Solano Eduardo⁵⁶⁷⁸^ORCID,Ramachandran Ranjith K.¹²³⁴^ORCID,Minjauw Matthias M.¹²³⁴,Resta Andrea⁹¹⁰¹¹¹²¹³,Vlad Alina⁹¹⁰¹¹¹²¹³,Garreau Yves⁹¹⁰¹¹¹²¹³,Coati Alessandro⁹¹⁰¹¹¹²¹³,Portale Giuseppe¹⁴¹⁵¹⁶¹³^ORCID,Detavernier Christophe¹²³⁴

Affiliation:

1. Department of Solid State Sciences

2. CoCooN group

3. Ghent University

4. Belgium

5. ALBA Synchrotron Light Source

6. NCD-SWEET beamline

7. Cerdanyola del Vallès

8. Spain

9. Synchrotron SOLEIL

10. SixS Beamline

11. L’Orme des Merisiers

12. 91192 Gif-sur-Yvette

13. France

14. ESRF European Synchrotron

15. DUBBLE Beamline BM26

16. 38043 Grenoble

Abstract

The nucleation rate and diffusion-driven growth of Pt nanoparticles are revealed within situX-ray fluorescence and scattering measurements during ALD: the particle morphology at a certain Pt loading is similar for high and low precursor exposures.

Funder

Fonds Wetenschappelijk Onderzoek

Bijzonder Onderzoeksfonds

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

http://pubs.rsc.org/en/content/articlepdf/2020/CP/D0CP03563G

Reference73 articles.

1. Atomic Layer Deposition of Noble Metals and Their Oxides

2. Tailoring nanoporous materials by atomic layer deposition